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"Lithography Defect Probability and Its Application to Physical Design ..."
Seongbo Shim, Woohyun Chung, Youngsoo Shin (2017)
- Seongbo Shim
, Woohyun Chung, Youngsoo Shin:
Lithography Defect Probability and Its Application to Physical Design Optimization. IEEE Trans. Very Large Scale Integr. Syst. 25(1): 271-285 (2017)
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