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"RL-OPC: Mask Optimization With Deep Reinforcement Learning."

Xiaoxiao Liang et al. (2024)

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DOI: 10.1109/TCAD.2023.3309745

access: closed

type: Journal Article

metadata version: 2024-01-13

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Xiaoxiao Liang, Yikang Ouyang, Haoyu Yang, Bei Yu, Yuzhe Ma:
RL-OPC: Mask Optimization With Deep Reinforcement Learning. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 43(1): 340-351 (2024)

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