"Ultrafast Source Mask Optimization via Conditional Discrete Diffusion."

Guojin Chen et al. (2024)

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DOI: 10.1109/TCAD.2024.3361400

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type: Journal Article

metadata version: 2025-01-19

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Guojin Chen, Zixiao Wang, Bei Yu, David Z. Pan, Martin D. F. Wong:
Ultrafast Source Mask Optimization via Conditional Discrete Diffusion. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 43(7): 2140-2150 (2024)

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