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"Alternate Electrical Tests for Extracting Mechanical Parameters of MEMS ..."
Vishwanath Natarajan, Soumendu Bhattacharya, Abhijit Chatterjee (2006)
- Vishwanath Natarajan, Soumendu Bhattacharya, Abhijit Chatterjee:
Alternate Electrical Tests for Extracting Mechanical Parameters of MEMS Accelerometer Sensors. VTS 2006: 192-199
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