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"Time dependent dielectric breakdown (TDDB) evaluation of PE-ALD SiN gate ..."
Tian-Li Wu et al. (2015)
- Tian-Li Wu
, Denis Marcon, Brice De Jaeger, Marleen Van Hove, Benoit Bakeroot
, Steve Stoffels
, Guido Groeseneken
, Stefaan Decoutere, Robin Roelofs:
Time dependent dielectric breakdown (TDDB) evaluation of PE-ALD SiN gate dielectrics on AlGaN/GaN recessed gate D-mode MIS-HEMTs and E-mode MIS-FETs. IRPS 2015: 6
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