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"A Fast Process-Variation-Aware Mask Optimization Algorithm With a Novel ..."

Ahmed Awad et al. (2017)

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DOI: 10.1109/TVLSI.2016.2616840

access: closed

type: Journal Article

metadata version: 2023-05-01

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Ahmed Awad, Atsushi Takahashi, Satoshi Tanaka, Chikaaki Kodama:
A Fast Process-Variation-Aware Mask Optimization Algorithm With a Novel Intensity Modeling. IEEE Trans. Very Large Scale Integr. Syst. 25(3): 998-1011 (2017)

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