"Control of a Novel 2-DoF MEMS Nanopositioner With Electrothermal Actuation ..."

Micky Rakotondrabe, Anthony G. Fowler, S. O. Reza Moheimani (2014)

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DOI: 10.1109/TCST.2013.2284923

access: closed

type: Journal Article

metadata version: 2020-06-15

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Micky Rakotondrabe, Anthony G. Fowler, S. O. Reza Moheimani:
Control of a Novel 2-DoF MEMS Nanopositioner With Electrothermal Actuation and Sensing. IEEE Trans. Control. Syst. Technol. 22(4): 1486-1497 (2014)

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