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"A GPU-Enabled Level-Set Method for Mask Optimization."

Ziyang Yu et al. (2023)

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DOI: 10.1109/TCAD.2022.3175939

access: closed

type: Journal Article

metadata version: 2023-02-10

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Ziyang Yu, Guojin Chen, Yuzhe Ma, Bei Yu:
A GPU-Enabled Level-Set Method for Mask Optimization. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 42(2): 594-605 (2023)

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