"Improved Tangent Space-Based Distance Metric for Lithographic Hotspot ..."

Fan Yang et al. (2017)

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DOI: 10.1109/TCAD.2016.2638440

access: closed

type: Journal Article

metadata version: 2020-09-24

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Fan Yang, Subarna Sinha, Charles C. Chiang, Xuan Zeng, Dian Zhou:
Improved Tangent Space-Based Distance Metric for Lithographic Hotspot Classification. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 36(9): 1545-1556 (2017)

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