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"Detailed Placement for Enhanced Control of Resist and Etch CDs."

Puneet Gupta, Andrew B. Kahng, Chul-Hong Park (2007)

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DOI: 10.1109/TCAD.2007.906998

access: closed

type: Journal Article

metadata version: 2021-10-28

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  - https://dblp.org/rec/journals/tcad/GuptaKP07
Puneet Gupta, Andrew B. Kahng, Chul-Hong Park:
Detailed Placement for Enhanced Control of Resist and Etch CDs. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 26(12): 2144-2157 (2007)

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