"A Structure Data-Driven Framework for Virtual Metrology Modeling."

Wei-Ting Yang et al. (2020)

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DOI: 10.1109/TASE.2019.2941047

access: closed

type: Journal Article

metadata version: 2020-07-31

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  - journals/tase/YangBRPR20
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  - https://dblp.org/rec/journals/tase/YangBRPR20
Wei-Ting Yang, Jakey Blue, Agnès Roussy, Jacques Pinaton, Marco S. Reis:
A Structure Data-Driven Framework for Virtual Metrology Modeling. IEEE Trans Autom. Sci. Eng. 17(3): 1297-1306 (2020)

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