"Wafer Defect Inspection Optimization With Partial Coverage - A Numerical ..."

Ming Qin et al. (2021)

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DOI: 10.1109/TASE.2020.3024651

access: closed

type: Journal Article

metadata version: 2021-11-03

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Ming Qin, Zhongshun Shi, Weiwei Chen, Siyang Gao, Leyuan Shi:
Wafer Defect Inspection Optimization With Partial Coverage - A Numerical Approach. IEEE Trans Autom. Sci. Eng. 18(4): 1916-1927 (2021)

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