"An Optical MEMS Acoustic Sensor Based on Grating Interferometer."

Mengying Zhang et al. (2019)

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DOI: 10.3390/S19071503

access: open

type: Journal Article

metadata version: 2019-06-02

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Mengying Zhang, Gaomi Wu, Dipeng Ren, Ran Gao, Zhimei Qi, Xingdong Liang:
An Optical MEMS Acoustic Sensor Based on Grating Interferometer. Sensors 19(7): 1503 (2019)

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