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"An Approach to Measure Tilt Motion, Straightness and Position of Precision ..."

Hsiu-An Tsai, Yu-Lung Lo (2019)

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DOI: 10.3390/S19122816

access: open

type: Journal Article

metadata version: 2020-05-30

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  - journals/sensors/TsaiL19
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  - https://dblp.org/rec/journals/sensors/TsaiL19
Hsiu-An Tsai, Yu-Lung Lo:
An Approach to Measure Tilt Motion, Straightness and Position of Precision Linear Stage with a 3D Sinusoidal-Groove Linear Reflective Grating and Triangular Wave-Based Subdivision Method. Sensors 19(12): 2816 (2019)

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