"On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic ..."

Binh Duc Truong, Cuong Phu Le, Einar Halvorsen (2019)

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DOI: 10.3390/S19173770

access: open

type: Journal Article

metadata version: 2024-07-04

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Binh Duc Truong, Cuong Phu Le, Einar Halvorsen:
On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers. Sensors 19(17): 3770 (2019)

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