"Thermal Drift Investigation of an SOI-Based MEMS Capacitive Sensor with an ..."

Haiwang Li et al. (2019)

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DOI: 10.3390/S19163522

access: open

type: Journal Article

metadata version: 2020-05-30

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Haiwang Li, Yanxin Zhai, Zhi Tao, Yingxuan Gui, Xiao Tan:
Thermal Drift Investigation of an SOI-Based MEMS Capacitive Sensor with an Asymmetric Structure. Sensors 19(16): 3522 (2019)

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