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"Techniques to study the reliability of metal RF MEMS capacitive switches."

Ingrid De Wolf, W. Merlijn van Spengen (2002)

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DOI: 10.1016/S0026-2714(02)00232-9

access: closed

type: Journal Article

metadata version: 2020-02-22

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Ingrid De Wolf, W. Merlijn van Spengen:
Techniques to study the reliability of metal RF MEMS capacitive switches. Microelectron. Reliab. 42(9-11): 1789-1794 (2002)

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