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"Finite element modeling of capacitive coupling voltage contrast."

Cher Ming Tan, Stanny Yanuar, Tai Chong Chai (2007)

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DOI: 10.1016/J.MICROREL.2007.07.060

access: closed

type: Journal Article

metadata version: 2020-02-22

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Cher Ming Tan, Stanny Yanuar, Tai Chong Chai:
Finite element modeling of capacitive coupling voltage contrast. Microelectron. Reliab. 47(9-11): 1555-1560 (2007)

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