"Novel FIB-based sample preparation technique for TEM analysis of ..."

Joachim C. Reiner, Philippe Gasser, Urs Sennhauser (2002)

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DOI: 10.1016/S0026-2714(02)00225-1

access: closed

type: Journal Article

metadata version: 2020-02-22

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Joachim C. Reiner, Philippe Gasser, Urs Sennhauser:
Novel FIB-based sample preparation technique for TEM analysis of ultra-thin gate oxide breakdown. Microelectron. Reliab. 42(9-11): 1753-1757 (2002)

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