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"Reliability of MEMS - a methodical approach."

Roland Müller-Fiedler, Ulrich Wagner, Winfried Bernhard (2002)

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DOI: 10.1016/S0026-2714(02)00229-9

access: closed

type: Journal Article

metadata version: 2020-02-22

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  - https://dblp.org/rec/journals/mr/Muller-FiedlerWB02
Roland Müller-Fiedler, Ulrich Wagner, Winfried Bernhard:
Reliability of MEMS - a methodical approach. Microelectron. Reliab. 42(9-11): 1771-1776 (2002)

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