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"Nitrogen bonding configurations near the oxynitride/silicon interface ..."

Francesca Monforte et al. (2007)

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DOI: 10.1016/J.MICROREL.2007.01.037

access: closed

type: Journal Article

metadata version: 2020-10-26

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Francesca Monforte, Marco Camalleri, Denise Calì, Giuseppe Currò, Enza Fazio, Fortunato Neri:
Nitrogen bonding configurations near the oxynitride/silicon interface after oxynitridation in N₂O ambient of a thin SiO₂ gate. Microelectron. Reliab. 47(4-5): 822-824 (2007)

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