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"Reliability of polysilicon microstructures: in situ test benches."

Olivier Millet, Dominique Collard, Lionel Buchaillot (2002)

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DOI: 10.1016/S0026-2714(02)00233-0

access: closed

type: Journal Article

metadata version: 2020-02-22

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Olivier Millet, Dominique Collard, Lionel Buchaillot:
Reliability of polysilicon microstructures: in situ test benches. Microelectron. Reliab. 42(9-11): 1795-1800 (2002)

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