"Dielectric thin films for MEMS-based optical sensors."

Mariusz Martyniuk et al. (2007)

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DOI: 10.1016/J.MICROREL.2007.01.060

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type: Journal Article

metadata version: 2024-10-06

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Mariusz Martyniuk, J. Antoszewski, C. A. Musca, J. M. Dell, L. Faraone:
Dielectric thin films for MEMS-based optical sensors. Microelectron. Reliab. 47(4-5): 733-738 (2007)

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