"Encapsulation of naked dies for bulk silicon etching with TMAH."

Silke Liebert (2002)

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DOI: 10.1016/S0026-2714(02)00098-7

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type: Journal Article

metadata version: 2020-02-22

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Silke Liebert:
Encapsulation of naked dies for bulk silicon etching with TMAH. Microelectron. Reliab. 42(12): 1939-1944 (2002)

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