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"Effect of contact-etch-stop-layer and Si1-xGex ..."
Chang-Chun Lee et al. (2018)
- Chang-Chun Lee, Chuan-Hsi Liu, Dian-Yong Li, Chia-Ping Hsieh:
Effect of contact-etch-stop-layer and Si1-xGex channel mechanical properties on nano-scaled short channel NMOSFETs with dummy gate arrays. Microelectron. Reliab. 83: 230-234 (2018)
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