"Use of scanning capacitance microscopy for controlling wafer processing."

O. Jeandupeux et al. (2002)

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DOI: 10.1016/S0026-2714(01)00234-7

access: closed

type: Journal Article

metadata version: 2020-02-22

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O. Jeandupeux, V. Marsico, A. Acovic, P. Fazan, H. Brune, K. Kern:
Use of scanning capacitance microscopy for controlling wafer processing. Microelectron. Reliab. 42(2): 225-231 (2002)

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