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"Modification of porous ultra-low K dielectric by electron-beam curing."

Cyril Guedj et al. (2007)

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DOI: 10.1016/J.MICROREL.2007.01.026

access: closed

type: Journal Article

metadata version: 2023-03-28

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  - https://dblp.org/rec/journals/mr/GuedjIMLRA07
Cyril Guedj, G. Imbert, E. Martinez, Christophe Licitra, Névine Rochat, V. Arnal:
Modification of porous ultra-low K dielectric by electron-beam curing. Microelectron. Reliab. 47(4-5): 764-768 (2007)

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