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"Micro-mechanical testing of SiLK by nanoindentation and substrate ..."

Viktor Gonda et al. (2007)

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DOI: 10.1016/J.MICROREL.2006.09.033

access: closed

type: Journal Article

metadata version: 2023-09-30

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Viktor Gonda, Kaspar M. B. Jansen, Leo J. Ernst, Jaap M. J. den Toonder, G. Q. Zhang:
Micro-mechanical testing of SiLK by nanoindentation and substrate curvature techniques. Microelectron. Reliab. 47(2-3): 248-251 (2007)

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