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"Thermal Ta2O5--alternative to SiO2 for ..."

Elena Atanassova, Dejan Spasov (2002)

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DOI: 10.1016/S0026-2714(02)00088-4

access: closed

type: Journal Article

metadata version: 2020-02-22

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Elena Atanassova, Dejan Spasov:
Thermal Ta₂O₅--alternative to SiO₂ for storage capacitor application. Microelectron. Reliab. 42(8): 1171-1177 (2002)

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