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"Improving hydrogenation efficiency of polycrystalline silicon thin film ..."

Xiangbin Zeng, X. W. Sun, Johnny K. O. Sin (2003)

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DOI: 10.1016/J.MEJO.2003.09.007

access: closed

type: Journal Article

metadata version: 2020-02-22

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Xiangbin Zeng, X. W. Sun, Johnny K. O. Sin:
Improving hydrogenation efficiency of polycrystalline silicon thin film transistors by a new approach. Microelectron. J. 34(11): 1079-1085 (2003)

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