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"Study and improvement of electrical performance of 130 nm Cu/CVD low k ..."
C. F. Tsang, V. N. Bliznetsov, Y. J. Su (2003)
- C. F. Tsang, V. N. Bliznetsov, Y. J. Su:
Study and improvement of electrical performance of 130 nm Cu/CVD low k SiOCH interconnect related to via etch process. Microelectron. J. 34(11): 1051-1058 (2003)
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