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"A new rule-based clustering technique for defect analysis."

N. G. Shankar, Z. W. Zhong (2005)

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DOI: 10.1016/J.MEJO.2005.02.120

access: closed

type: Journal Article

metadata version: 2020-02-22

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N. G. Shankar, Z. W. Zhong:
A new rule-based clustering technique for defect analysis. Microelectron. J. 36(8): 718-724 (2005)

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