"The local structural characterization of the inactive clusters in B, ..."

M. Alper Sahiner et al. (2005)

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DOI: 10.1016/J.MEJO.2005.02.095

access: closed

type: Journal Article

metadata version: 2025-03-03

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M. Alper Sahiner, Daniel F. Downey, Steven W. Novak, Joseph C. Woicik, Dario A. Arena:
The local structural characterization of the inactive clusters in B, BF₂ and BF₃ implanted Si wafers using X-ray techniques. Microelectron. J. 36(3-6): 522-526 (2005)

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