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"A new approach for eliminating unwanted patterns in attenuated phase shift ..."

Moitreyee Mukherjee-Roy et al. (2003)

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DOI: 10.1016/S0026-2692(03)00195-2

access: closed

type: Journal Article

metadata version: 2020-02-22

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  - https://dblp.org/rec/journals/mj/Mukherjee-RoySMS03
Moitreyee Mukherjee-Roy, Navab Singh, Sohan Singh Mehta, G. S. Samudra:
A new approach for eliminating unwanted patterns in attenuated phase shift masks. Microelectron. J. 34(10): 965-967 (2003)

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