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"Analysis of the effects of reflectance and refraction generated by wafers ..."
Yang-Kuao Kuo, Chuen-Guang Chao (2005)
- Yang-Kuao Kuo, Chuen-Guang Chao:
Analysis of the effects of reflectance and refraction generated by wafers made from fused silica, ALOxNy and TiSixNy under different light sources on pattern length and best focus. Microelectron. J. 36(1): 35-39 (2005)
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