"The effects of the nitrogen on the electrical and structural properties of ..."

M. Guerino et al. (2003)

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DOI: 10.1016/S0026-2692(03)00079-X

access: closed

type: Journal Article

metadata version: 2020-02-22

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  - https://dblp.org/rec/journals/mj/GuerinoMMOM03
M. Guerino, Marcos Massi, H. S. Maciel, C. Otani, Ronaldo Domingues Mansano:
The effects of the nitrogen on the electrical and structural properties of the diamond-like carbon (DLC) films. Microelectron. J. 34(5-8): 639-641 (2003)

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