"CMOS compatible bistable electromagnetic microvalve on a single wafer."

Jemmy S. Bintoro, Peter J. Hesketh, Yves H. Berthelot (2005)

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DOI: 10.1016/J.MEJO.2005.04.038

access: closed

type: Journal Article

metadata version: 2021-10-14

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Jemmy S. Bintoro, Peter J. Hesketh, Yves H. Berthelot:
CMOS compatible bistable electromagnetic microvalve on a single wafer. Microelectron. J. 36(7): 667-672 (2005)

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