"Semiconductor manufacturing: design, development and application of an ..."

Chin Soon Chong, Appa Iyer Sivakumar, Robert K. L. Gay (2002)

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DOI: 10.1109/WSC.2002.1166478

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Chin Soon Chong, Appa Iyer Sivakumar, Robert K. L. Gay:
Semiconductor manufacturing: design, development and application of an object oriented simulation toolkit for real-time semiconductor manufacturing scheduling. WSC 2002: 1849-1856

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