"Bottom-up fabrication of special parylene films based on selective growth ..."

Yi Zhou et al. (2009)

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DOI: 10.1109/NEMS.2009.5068614

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-13

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  - https://dblp.org/rec/conf/nems/ZhouDNWW09
Yi Zhou, Fei Ding, Chao Ni, Wei Wang, Wengang Wu:
Bottom-up fabrication of special parylene films based on selective growth on Au-coated surface. NEMS 2009: 441-444

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