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ORCID4th NEMS 2009: Shenzhen, China
- 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. IEEE Computer Society 2009, ISBN 978-1-4244-4629-2
- Lidong Du, Zhan Zhao, Cheng Pang, Zhen Fang, Yonghong Liu, Youjun Han:
Micro solid state silicon plate wind velocity sensor. 1-4 - Haitao Ding, Zhenchuan Yang, Guizhen Yan:
Performance comparison of methods to evading notching effect for SOG structures in DRIE. 5-8 - Ling-min Yu, Chang-Chun Zhu:
Electrophoresis deposition and field emission properties of composites films ZnO nanoneedles/CNTs. 9-12 - Shubin Yan, Yingzhan Yan, Zhe Ji, Baohua Wang, Shaohui Wang, Guoqing Jiang, Jijun Xiong, Xiongying Ye, Zhaoying Zhou, Wendong Zhang
:
A precise measurement of quality factor for Planar Microtoroid Resonators. 13-16 - Xingli Zhang, Zhaowei Sun, Guoqiang Wu:
Molecular dynamics simulation on the out-of plane thermal conductivity of monocrystal germanium thin-film. 17-20 - Xudong Zou, Kenle Chen, Hualiang Zhang, Jinwen Zhang:
Design and simulation of 4-bit 10-14GHz RF MEMS tunable filter. 21-24 - Dong-Ming Fang, Haixia Zhang, Xiao-Lin Zhao:
Tunable MEMS capacitors considering deformation factor. 25-28 - Jikun Yi, Wei Li, Lingfang Wang, Zhiyu Wen:
The simulation of frequency-capacitance characteristics of fresh water conductivity sensor. 29-32 - Shao-Chun Sun, Geng-Chen Shi:
Research on the output characteristics of MEMS convective accelerometer under heavy impact. 33-36 - Jinghui Xu, Weizheng Yuan, Honglong Chang, Binghe Ma:
Angularly parameterized macromodel extraction for microstructures with a large number of terminals. 37-40 - Michael Kraft, Haitao Ding:
Sigma-delta modulator based control systems for MEMS gyroscopes. 41-46 - Ruican Hao, Decai Li:
Preparation of kerosene based nano-magnetic fluid and its application in pressure difference sensors. 47-50 - Zhaoxin Geng, Qing Li, Wei Wang, Zhihong Li:
Theoretical analysis and fabrication of PDMS-based surface plasmon resonance sensor chips. 51-54 - Bian Tian, Yulong Zhao, Zhuangde Jiang, Ling Zhang, Nansheng Liao, Yuanhao Liu, Chao Meng:
The analysis and structural design of micro SOI pressure sensors. 55-58 - Kai Yang, Zhigang Li, Yupeng Jing, Dapeng Chen, Tianchun Ye:
Research on the resonant frequency formula of V-shaped cantilevers. 59-62 - Nor Zaidi Haron, Said Hamdioui, Sorin Cotofana:
Emerging non-CMOS nanoelectronic devices - What are they?. 63-68 - Tsung-Han Tsai, Dar-Sun Liou, Ping-Hei Chen, Chin-Ting Yang:
Enhancement of mixing performance of water solutions in a micro-mixer with immiscible ferrofluid. 69-74 - Tao Chen, Liguo Chen, Baixu Liu, Jiachou Wang, Xinxin Li:
Design of a four-arm structure MEMS gripper integrated with sidewall force sensor. 75-79 - Fengtian Han, Zhenbin Fu, Jingxin Dong:
Design and simulation of an active electrostatic bearing for MEMS micromotors. 80-85 - Yibin Gong, Huamin Gao, Xiang Liu, Wenping Liu, Tie Li, Ping Zhou, Yuelin Wang:
Silicon Nanowire fabricated by MEMS technology and its application in biochemical detection. 86-89 - Min Miao, Yufeng Jin, Hongguang Liao, Liwei Zhao, Yunhui Zhu, Xin Sun, Yunxia Guo:
Research on deep RIE-based through-Si-via micromachining for 3-D system-in-package integration. 90-93 - Julien Arcamone, Marc Sansa, Jaume Verd, Arantxa Uranga, Gabriel Abadal, Núria Barniol, Marc A. F. van den Boogaart, Juergen Brugger, Francesc Pérez-Murano:
Nanomechanical mass sensor for monitoring deposition rates through confined apertures. 94-97 - X. Chen, D. F. Cui, L. L. Zhang:
Design and fabrication of microfluidic chip with micro/nano structures. 98-101 - Hai Liu, Xiaohang Chen, Dong Xu, Zhongyu Hou, Yafei Zhang:
Microfabricated breath sensor based on carbon nanotubes for respiration monitoring. 102-105 - Wenli Zhou, Sanping Wan, Chao Zhu:
Analysis on electro-thermal property of micro-bubble generator using carbon nanotube heating elements. 106-111 - Tan D. Tran, Minh D. Nguyen, Long T. Nguyen, Tue Huu Huynh, Thuy P. Nguyen:
Novel synthesis design of a 3-DOF silicon piezoresistive micro accelerometer. 112-115 - Haibo Yu, Niandong Jiao, Zaili Dong, Yanli Qu, Wen Jung Li, Yuechao Wang:
Nanoscale welding by AFM tip induced electric field. 116-120 - Haijun Zhang, Changsheng Zhu, Qin Yang:
Effect of effective viscosity on characteristics of microscale gas journal bearings. 121-125 - Liqiang Xie, Dingbang Xiao, Haoxu Wang, Xuezhong Wu, Shengyi Li:
Sensitivity analysis and structure design for tri-mass structure micromachined gyroscope. 126-129 - Yi Liu, Yaquan Tang, Xiaomei Yu:
SOI-based capacitive micromechanical resonator with submicron gap-spacing. 130-133 - Dong Ying, Wei Gao, You Zheng:
Direct bonding SOI Wafer based MEMS cantilever resonator for trace gas sensor applicaiton. 134-138 - Haitao Cheng, Heng Yang, Yuelin Wang:
Fabrication of nanobeam using Focused ion beam (FIB) and KOH etching. 139-142 - Hua Sun, Haixu Zhou, Xiang Li, Yanhui Wei, Xiao Li:
Design of two-wheel self-balanced electric vehicle based on MEMS. 143-146 - Huiqi He, Donald C. Chang, Yi-Kuen Lee:
Battery-powered miniaturized electroporation system for in-situ gene transfer in stem cell research. 147-151 - Kenle Chen, Yueyang Dai, Xudong Zou, Jinwen Zhang:
A low-loss RF MEMS switch with dielectric layer on the lower surface of the bridge. 152-155 - Lingyun Wang, Yibo Zeng, Wenwang Li, Daoheng Sun:
Etch-back in DDSOG process by ultrasonic agitation and application to tunneling gyroscope fabrication. 156-159 - Qijun Xiao, Wenyuan Chen, Gaoyin Ma, Feng Cui, Shengyong Li, Weiping Zhang:
Simulation of levitation control for a micromachined electrostatically levitated gyroscope. 160-163 - Jia-Hong Zhang, Qing-An Huang, Hong Yu:
Effect of temperature and elastic constant correction on piezoresistivity of silicon nanobeams. 164-167 - Chi-Yuan Lee, Shuo-Jen Lee, Yuh-Chung Hu, Chen-Hen Lin, Yu-Ming Lee, Wei-Yuan Fan:
Integration of micro temperature sensor and metal foil as gas diffusion layer for micro fuel cell. 168-171 - Chi-Yuan Lee, Shuo-Jen Lee, Wen-Pin Shih, Chen-Hen Lin, Chi-Chung Chang, Pei-Zen Chang:
Fabrication of micro temperature sensor and heater in a stainless steel-based micro reformer. 172-175 - Siva Penmetsa, Tianhua Zhang, Zhongcheng Gong, Tae-woo Lee, Long Que:
Design and modeling of a tunable optical antenna enabled by a micromachined actuator. 176-180 - Tianhua Zhang, Zhongcheng Gong, Long Que:
A white-light source operated polymer-based micromachined Fabry-Perot chemo/biosensor. 181-184 - Wang Ya-Zhou, Chen Li-Xin, Song Jia-Le:
Characterization of Si3N4/SiC Microstructure Derived from UV curable polymer ceramic precursor pyrolyzing. 185-189 - Hai-Feng Zhang, Xiao-wei Liui, Zhi-cheng Peng, Xi-Lian Wang, Wei Wang, Yufeng Chen:
Design of movable contactless conductivity detector for microchip capillary electrophoresis. 190-193 - Xiuling Zhang, Feng Jin, Jianxin Xing:
Electroreduction of nitrite based on Ag/PPy nanowires modified electrodes. 194-197 - Xuejiao Fan, Dacheng Zhang:
Parameter characterization of anodic bonded electrical interconnect in MEMS/NEMS devices. 198-201 - Pingan Zhao, Yinqing Li, Xiangyu Zeng, Jia Zhou, Yiping Huang, Ran Liu:
EWOD using P(VDF-TrFE). 202-205 - Weihua Li, Wenzhong Lou, Xin Li, Rongsen Hong, Liang Hu:
Integration micro-magnetic sensor and accelerometer microsystem for orienting application. 206-210 - Wei-Hsin Gau, Shin-Chun Huang, Yuh-Chung Hu:
Fabrication and vibration analysis of micro-cross beams. 211-214 - Xu Zhao, Xin Zhao, Guizhang Lu:
State engine based validation of MEMS process sequences. 215-218 - Chen-Hsun Weng, Chih-Chia Huang, Chen-Sheng Yeh, Gwo-Bin Lee:
Using micro-reactors to synthesize alloy FeGa2O4 magnetic nanoparticles. 219-222 - Dar-Bin Shieh, Chia-Chun Hsieh, Song-Bin Huang, Gwo-Bin Lee:
A microfluidic-based cell culture platform for cellular and subcellular imaging. 223-226 - Sung-Yi Yang, Fong-Yu Cheng, Chen-Sheng Yeh, Huan-Yao Lei, Gwo-Bin Lee:
Synthesis of gold nanoparticles using a vortex-type micro-mixing system. 227-230 - Xing Song, Haifeng Dong, Jiancheng Fang:
Chip scale atomic magnetometer based on SERF. 231-234 - Liang Hu, Wenzhong Lou, Renlong Song, Chao Gao, Xin Li:
A novel design of micro-magnetic sensor guidance system for the blind. 235-237 - Yang Yang, Jing Liu:
Controlling of micro/nano fluidics array using single ice valve. 238-243 - Yang Yang, Jing Liu:
Theoretical characterization on nano freeze tweezer enabled from convective cooling principle. 244-248 - Chi-Chang Lin, Chen-Yuan Yu, Ying-Mei Yang, Yung-Ming Chu, Hong-Ping Lin, Hsien-Chang Chang:
A novel SERS active particle with highly bio-organics absorption affinity for the description of bacteria fingerprint. 249-252 - Jianbing Xie, Weizheng Yuan, Honglong Chang:
A novel method for the manufacture of MEMS devices with large exposed area based on SOI wafers. 253-256 - Yunhuan Zheng, Jianzhang Wu, Jianbo Shao, Qinghui Jin, Jianlong Zhao:
Development of a novel perfusion microfluidic cell culture device for cell-based assays. 257-260 - Wenzhong Lou, Renlong Song, Yunjian Liu, Xiaosong Liu, Weihua Li, Wanfeng Lin:
A novel multi-direction high shock reliability test on MEMS devices. 261-264 - Zhigang Che, Liangcai Xiong, Tielin Shi, Zirong Tang, Huayang Cheng, Likun Yang:
Numerical and experimental study of Microscale Laser Shock Processing using excimer laser. 265-269 - Cheng Pang, Zhan Zhao, Jiangang Zhang, Li Shi, Lidong Du, Zhen Fang, Yonghong Liu:
An advantageous fabrication technology to integrate pressure sensor into multi-sensor for micro weather station. 270-273 - Chen-Kuei Chung, W. T. Chang:
Comparison of methods for sensing contact potential difference of nanocrystalline alloy films using a kelvin actuating capacitor. 274-277 - Zhongcheng Gong, Krithika Nagarajan, Siva Penmetsa, David Mills, Long Que:
A patch-clamp device with integrated actuators for cell selection and positioning. 278-281 - Gaoyin Ma, Wenyuan Chen, Qijun Xiao, Weiping Zhang, Feng Cui, Kai Li:
Single-neuron spinning control system for a non-silicon micromachined rotational gyro. 282-285 - Yan Cui, Huilin Chen, Jinsong Xia, Jiaxin Zhao, Jing Wang, Liding Wang:
Study on PSZT thin films for microforce sensors. 286-290 - Yipeng Lu, Weiping Zhang, Xiaosheng Wu, Wenyuan Chen, Feng Cui:
Design and analysis of novel solid biaxial micro-gyroscope with special mode excitation. 291-294 - Jizhou Sun, Chao Bian, Lan Qu, Shanhong Xia:
A micro amperometric immunosensor immobilized with electropolymerized staphylococcal protein a for the detection of salmonella typhimurium. 295-298 - Zhuangde Jiang, Fengxia Zhao, Weixuan Jing, Philip D. Prewett, Kyle Jiang:
Characterization of line edge roughness and line width roughness of nano-scale typical structures. 299-303 - Xiaosheng Wu, Wenyuan Chen, Weiping Zhang, Yipeng Lu, Feng Cui, Xiaolin Zhao:
Modeling analysis of piezoelectric micromachined modal gyroscope (PMMG). 304-309 - Yinhong Dai, Donghang Chen, Lingyun Wang, Daoheng Sun:
Investigations on electrohydrodynamical drop-on-demand inkjet printing. 310-313 - Yu-Cheng Ou, Chih-Wen Hsu, Lung-Jieh Yang, Hsieh-Cheng Han, Yi-Wen Liu, Chien-Yuan Chen:
The micropatterns of glutaraldehyde-crosslinked gelatin as ECM for attachment of tumor cells. 314-318 - Chenying Yang, Wei Wang, Zhihong Li:
Optimization of corona-triggered PDMS-PDMS bonding method. 319-322 - Jing Wang, Bing Qu, Yan Ming Su, Chao Pan, Wei Guo Cai:
Artifical fish flocked surface as a possible anti-biofoulant. 323-326 - Ke Tao, Dexian Zhang, Yun Sun, Linshen Wang, Jingfang Zhao, Ying Xue, Yuanjian Jiang, Hongkun Cai, Yanping Sui, Jin Wang:
Boron doped hydrogenated nanocrystalline silicon thin films prepared by layer-by-layer technique and its application in n-i-p flexible amorphous silicon thin film solar cells. 327-330 - Jin Wang, Guofeng Li, Yiyi Liu, Yi Lu, Xianhu Gao, Yong Zhang, Ke Tao:
Vehicle supervision system based on MEMS geomagnetic sensor. 331-334 - Yi Jae Lee, Jung Doo Kim, Jae Yeong Park:
Nafion coated enzyme free glucose micro-biosensors for anti-fouling of protein. 335-338 - Dingbang Xiao, Liqiang Xie, Zhanqiang Hou, Xuezhong Wu, Shengyi Li:
Analyzing the frequency response of micromachined capacitive inertial devices by the third harmonic detection. 339-342 - Xiuling Ji, Yunjian Liu, Wenzhong Lou:
Design and parametric study of a tubular passive micro direct methanol fuel cell. 343-347 - Kashif Naeem, Ouyang Feng:
Effect of calcination on photocatalytic activity of Fe3+-doped TiO2 nanoparticles for degradation of phenol under UV irradiation. 348-352 - Ping Tang, Jian Yang, Jianjun Ye, Jinyang Zheng, Chikong Lam, Ieong Wong, Yanbao Ma:
Using the improved DSMC method to predict the reliability of micro-flow channels. 353-358 - Fu-Wen Yeh, Lung-Jieh Yang, Guo-Yuan Hess, Ching-Jiun Lee, Che-Chien Chu, Horn-Jiunn Sheen:
The arrowed surface ratchets with hydrophobic parylene for droplet transportation. 359-362 - Kuan-Yu Chen, Ju-Nan Kuo:
Diffraction angle prediction of surface micromachined planar curved grating and crossed grating. 363-366 - Guangmei Zhai, Daoli Zhang, Lin Yuan, Jianbing Zhang:
Synthesis and studies of spindle-shaped lead selenide nanocrystals. 367-370 - Jia Hao Zhao, Shi Jie Yu, Ke Li, Ying Dong, Qin Zhou, Zheng You:
Improvement of a micro-beam in a smart gas sensor with resonating mechanism. 371-375 - Guanggui Cheng, Jianning Ding, Biao Kan, Junziong Wang, Ningyi Yuan:
Study on the electrical contact property at the interface of the NiCr/TiW films. 376-379 - Khashayar Babaei Gavan, Joost van der Heijden, Emile W. J. M. van der Drift, Herre S. J. van der Zant:
Effect of pressure on the Q factor and the resonance frequency of SiN microcantilevers. 380-384 - Hung-Chia Lin, Yi-Ju Liu, Da-Jeng Yao:
DNA ligation using coplanar electrodes electro-wetting-ondielectric (EWOD) device. 385-389 - Fei-Bin Hsiao, Yung-Chun Lee, Lee Chang Hsiang:
Lamb wave excitation on non-piezoelectric materials using Lorentz force induced by current in meander line structure. 390-395 - Weiping Chen, Xiaoliang Chen, Guoguang Zheng, Xiaowei Liu, Haifeng Zhang:
Analysis of the self-test characteristics of a micromachined accelerometer. 396-399 - Hamed Sadeghian, Chung Kai Yang, Khashayar Babaei Gavan, Hans Goosen, Emile W. J. M. van der Drift, Here van der Zant, Paddy J. French, Andre Bossche, Fred van Keulen:
Surface contamination-induced resonance frequency shift of cantilevers. 400-403 - Jinhui Lan, Yuqiao Shi:
Vehicle detection and recognition based on a MEMS magnetic sensor. 404-408 - Aimiao Qin, Yuzi Liu, Zhong Lin Wang:
Solution growth of HgTe Nanoweires at lowtemperature. 409-412 - J. N. Ding, H. S. Qi, N. Y. Yuan, Y. L. He, G. G. Cheng:
Influence of post-annealing on the mechanical and electrical properties of boron-doped nanocrystalline silicon thin films. 413-415 - Sen Yao, Shunji Goto, Junpei Sakurai, Tadahiko Shinshi, Minoru Uehara, Hitoshi Yamamoto:
SiN-based micro cantilever actuators using NdFeB/Ta permanent magnetic thin film. 416-419 - Zongwei Niu, Zhiyong Li, Li Li, Rongguo Hou:
Optimization of process parameters based on ANN when synthesizing nano-size hydroxyapatite using Solgel method. 420-423 - Zongwei Niu, Zhiyong Li, Li Li, Rongguo Hou:
Thermodynamics analyse of the synthesizing of nano-size hydroxyapatite using Sol-gel method. 424-427 - Gang Zhao, Wen Li, Guanrong Tang, Jing Chen:
Fabrication of bulk titanium out-of-plane microneedles. 428-431 - Yue Chen, Xiuhan Li, Dong-Ming Fang, Quan Yuan, Haixia Zhang:
Spiral capacitor based on copper electroplating. 432-435 - Jinxing Wang, Apurba Laha, Andreas Fissel, Dominik Schwendt, Rytis Dargis, Tatsuro Watahiki, Roman Shayduk, Wolfgang Braun, Tianmo Liu, H. Jörg Osten:
Structural and strain relaxation study of epitaxially grown nano-thick Nd2O3/Si(111) heterostructure. 436-440 - Yi Zhou, Fei Ding, Chao Ni, Wei Wang, Wengang Wu:
Bottom-up fabrication of special parylene films based on selective growth on Au-coated surface. 441-444 - Shailesh Madisetti, Zhiguo Zheng, Zhongcheng Gong, Siva Penmetsa, Yuri Lvov, Long Que:
Layer-by-layer nanoscale-coating of microparticles with a droplet microfluidic device. 445-448 - Qinglong Zheng, Zhuo Wang, Yong Xu:
Design and optimization of parylee nanomechanical cantilevers with integrated piezoresistors for surface-stress based biochemical sensing. 449-453 - Sewan Park, Joonyeop Lee, Hyeon Cheol Kim, Kukjin:
A study on inteference between 3D MEMS inductor and VCO. 454-457 - Yuguang Li, Yinfeng Liu, Liping Wang, Beilei Gu, Haiyan Mao, Hefeng Hu, Li Liu, Ying Gu, Yiben Xia:
UV absorption and photoluminescence of nanometer-sized ZnS prepared by different routes. 458-462 - Huiqi He, Donald C. Chang, Yi-Kuen Lee:
Battery-powered miniaturized electroporation system for in-situ gene transfer in stem cell research. 463-467 - Chaohui Wang, Peng Ye, Kerun Lee, Jingju Wang, Jing Wang:
The design and fabrication of a new blood-filtering chip based on SU-8 and PDMS. 468-471 - Lei Nie, Tielin Shi, Zirong Tang, Shiyuan Liu, Guanglan Liao:
Low temperature direct bonding for hermetic wafer level packaging. 472-475 - Xuezhong Wu, Peitao Dong, Zhaoze li, Shengyi Li, Qinghui Liu, Chao Xu, Hong Wan:
Design, fabrication and characterization of a solid propellant micro-Thruster. 476-479 - Jing Zhang, Kaizhou Tan, Siliu Xu, Zhengfan Zhang, Yukui Liu, Guangbing Chen, Kaicheng Li, Heming Zhang, Huiyong Hu:
A novel p+ Poly-SiGe Gate CMOS device. 480-484 - T. W. Chang, T. J. Chung, T. Ru, Tzer-En Nee, H. C. Lu, G. M. Wu:
Investigation of InGaN/GaN multiple quantum wells with strain relief behavior for light-emitting diodes. 485-488 - Guangyi Shi, Yuexian Zou, Yufeng Jin, Yali Zheng, Wen Jung Li:
Multi-category human motion recognition based on MEMS inertial sensing data. 489-493