"Sensitivity analysis and structure design for tri-mass structure ..."

Liqiang Xie et al. (2009)

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DOI: 10.1109/NEMS.2009.5068541

access: closed

type: Conference or Workshop Paper

metadata version: 2025-05-01

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Liqiang Xie, Dingbang Xiao, Haoxu Wang, Xuezhong Wu, Shengyi Li:
Sensitivity analysis and structure design for tri-mass structure micromachined gyroscope. NEMS 2009: 126-129

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