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"SOI digital accelerometer based on pull-in time configuration."

Lukasz S. Pakula, Vijayekumar Rajaraman, Patrick J. French (2009)

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DOI: 10.1109/NEMS.2009.5068659

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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  - https://dblp.org/rec/conf/nems/PakulaRF09
Lukasz S. Pakula, Vijayekumar Rajaraman, Patrick J. French:
SOI digital accelerometer based on pull-in time configuration. NEMS 2009: 628-631

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