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"An improved method to remove anti-footing Al layer after DRIE."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

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Yuan Li, Zhenchuan Yang, Guizhen Yan (2009)

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DOI: 10.1109/NEMS.2009.5068712

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Yuan Li, Zhenchuan Yang, Guizhen Yan:
An improved method to remove anti-footing Al layer after DRIE. NEMS 2009: 868-871

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last updated on 2023-03-23 23:58 CET by the dblp team

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