"A Resonant Differential Pressure Microsensor With a Stress Isolation Layer."

Yadong Li et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451332

access: closed

type: Conference or Workshop Paper

metadata version: 2023-10-23

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Yadong Li, Chao Cheng, Yulan Lu, Jian Chen, Junbo Wang, Deyong Chen:
A Resonant Differential Pressure Microsensor With a Stress Isolation Layer. NEMS 2021: 1691-1694

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