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"Effect of nitrogen flow ratios on microstructure and mechanical properties ..."
Chen-Kuei Chung, J. J. Jhu (2009)
- Chen-Kuei Chung, J. J. Jhu:
Effect of nitrogen flow ratios on microstructure and mechanical properties of nanocomposite Ti-Si-N thin flims. NEMS 2009: 783-786
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