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"MEMS Fabrication."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

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Gary K. Fedder (2003)

Trier

Dagstuhl

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DOI: 10.1109/TEST.2003.1270898

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Gary K. Fedder:
MEMS Fabrication. ITC 2003: 691-698

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last updated on 2023-03-23 23:58 CET by the dblp team

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