"High performance source optimization using a gradient-based method in ..."

Yao Peng et al. (2010)

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DOI: 10.1109/ISQED.2010.5450390

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-13

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  - conf/isqed/PengZWY10
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Yao Peng, Jinyu Zhang, Yan Wang, Zhiping Yu:
High performance source optimization using a gradient-based method in optical lithography. ISQED 2010: 108-113

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