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"Concurrent Guiding Template Assignment and Redundant via Insertion for ..."

Jiaojiao Ou, Bei Yu, David Z. Pan (2016)

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DOI: 10.1145/2872334.2872352

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Jiaojiao Ou, Bei Yu, David Z. Pan:
Concurrent Guiding Template Assignment and Redundant via Insertion for DSA-MP Hybrid Lithography. ISPD 2016: 39-46

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