"Single-Wafer Pressure Capacitive Sensor."

R. G. Bolea, Antonio Luque, José M. Quero (2007)

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DOI: 10.1109/ISCAS.2007.378220

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-26

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R. G. Bolea, Antonio Luque, José M. Quero:
Single-Wafer Pressure Capacitive Sensor. ISCAS 2007: 3315-3318

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