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"Role of Defects in the Reliability of HfO2/Si-Based Spacer Dielectric ..."
Chen Wu et al. (2019)
- Chen Wu, Adrian Vaisman Chasin, Andrea Padovani
, Alicja Lesniewska, Steven Demuynck, Kris Croes:
Role of Defects in the Reliability of HfO2/Si-Based Spacer Dielectric Stacks for Local Interconnects. IRPS 2019: 1-6
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